Photonics Laser Workstation - IPG Microsystem laser workstation, model IX-6600-- MX, s/n 32099 (2014), with Microtech camera system including Dalsa CR-GM03- M6401 digital process/beam and inspection camera, with Optem 70XL zoom lens, Micro X excimer laser unit with beam splitter, laser interface panel, stand alone operator computer station, solenoid manifold /pneumatic and purge panel, motion /digital I/O electronic control panel with AC brushless servo X and Y axis and stepmotor Z axis step drive motor controls, laser fire controller, ethernet switch-24vdc, variable speed attenuator, pneumatic beam stop, BDS chamber, mask positioner, 250mm x 200mm XY range motion, 3-1/2" dia vacuum chuck on 7-1/2" dia base with lift loader, top duct bent, slide out safety enclosure, model 2204-13-A15806, wafer handler control box, 208v, 60hz, 3.6kVA

Thermo Chiller - SMC thermo chiller, model HRS012-AN-20, s/n RX186, 200-
230vac, 1ph, 50/60hz, 0.2kA, R-407c (HFC)


2 Pallets
Pallet 1: 78x48x94  3,500#
Pallet 2: 72x48x48  1,000#

PRIMSA
BAY 3